Nicolet ECO/RS 晶片塑性系統(tǒng)
- 公司名稱 賽默飛世爾科技(原熱電公司)
- 品牌
- 型號(hào) Nicolet ECO/RS
- 產(chǎn)地 英國(guó)
- 廠商性質(zhì) 生產(chǎn)廠家
- 更新時(shí)間 2017/7/18 11:26:33
- 訪問(wèn)次數(shù) 1784
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Nicolet ECO/RS Wafer Profiling System | ||
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The NicoletTM ECOTM/RS FT-IR Semiconductor Wafer Profiling System is ideally suited for research and development in semiconductor wafer manufacturing. The ECO/RS 300 is commonly used for measuring dopant concentration levels in dielectric films (BPSG, PSG, FSG, etc.), hydrogen levels in silicon nitride films, epitaxial film thickness, MEMS device thickness, and substitutional Carbon and interstitial oxygen levels in silicon wafers. The ECO/RS 300 can be used with wafers ranging from slugs and pieces to 300 mm in diameter. | ||
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Product Detail | ||
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Some of the highlights of the tool include:
The ECO/RS 300 maintains the low cost of ownership and high reliability of our long-running series of FT-IR products. Founded on our base of expertise in FT-IR technology, the ECO/RS 300 is also at the top of its class in performance. Thermo is committed to offering the most expertise and the best possible tools for FT-IR metrology. The ECO/RS 300 is another affirmation of this commitment. |