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Bronkhorst氣體質(zhì)量流量控制器
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- 公司名稱 北京博諾格儀器有限公司
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- 更新時(shí)間 2018/5/14 9:00:00
- 訪問(wèn)次數(shù) 558
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ACCURACY (ATCALIBRATIONUNDEROPERATINGCONDITIONS) | Standard 3F-Calibration: ±0.8% of reading plus ±0.2% of full scale Polynomial calibration: ±0.5% of reading plus ±0.1% of full scale |
REPRODUCIBILITY | < 0.1% full scale |
REPEATABILITY | < 0.2% of reading |
RESPONSETIME | 1...2 sec. (faster on request) |
CONTROL STABILITY | < ±0.1% full scale (typical for 1 ln/min N2) |
PRESSURE SENSITIVITY | 0.1%/bar typ. N2 0.01%/bar typ. H2 |
ATTITUDE SENSITIVITY | max. error 0.015% at 1 bar N2and 90°change |
VIBRATION SENSITIVITY | negligible |
TEMPERATURE SENSITIVITY | zero point approx. 0.05% of full scale/°C |
SUPPLY VOLTAGE SENSITIVITY | zero at correct supply voltages (acc. to electr. data) |
CONTROLVALVE | closes automatically at setpoint < 1% |
LEAKINTEGRITY | tested < 2 x 10-9mbar l/s He |
RF | CE approved design |
MECHANICALPARTS | |
PROCESSCONNECTIONS | see model number code; other on application |
MATERIAL SOFCONSTRUCTION | stainless steel AISI 316L or comparable |
SEALS | Viton, EPDM, elast. PTFE, other on application |
SURFACE QUALITY | Ra 0.2...0.6 µm |
OPERATING LIMITS | |
RANGE | 2%...* |
TYPESOFGASES | all gases compatible with AISI 316L |
TEMPERATURE | -10 °C up to +70 °C |
WARMING-UPTIME | 30 min. for optimum accuracy, 2 min. for accuracy ±2% of full scale |
ELECTRICAL PROPERTIES | |
SUPPLY VOLTAGE | mass flow meter +15 V...24 V, 50 mA mass flow controller +15 V, 250 mA -15 V, 30 mA mass flow controller +24 V, 190 mA |
OUTPUT SIGNAL | 0...5 V, 0...10 V, 4…20mA |
SETPOINT SIGNAL | 0...5 V, 0...10 V, 4…20mA |
ELECTRICAL CONNECTION | 9-pin sub-D connector, cable length independent |